|
|
: Premix, Buffer
– , . , , , , . , , , , , , . . .
|
|
|
|
COMPexPro 102, COMPexPro110
|
XeCl
|
308
|
HCl + H2 + He + Xe + Ne
|
COMPexPro 201, COMPexPro 205
|
HCl + H2 + He + Xe + Ne
|
COMPexPro 102, COMPexPro110
|
KrF
|
248
|
F2 + He + Kr + Ne
|
COMPexPro 201, COMPexPro 205
|
F2 + He + Kr + Ne
|
BraggStar M
|
F2 + He + Kr + Ne
|
COMPexPro 102, COMPexPro 110
|
ArF
|
193
|
F2 + Ar + Ne + He
|
COMPexPro 201, COMPexPro 205
|
F2 + He + Ar + Ne
|
COMPexPro F2
|
F2
|
157
|
F2 + He
|
COMPexPro 102, COMPexPro110
|
XeF
|
351
|
F2 + He + Xe + Ne
|
COMPexPro 201, COMPexPro 205
|
F2 + Xe + Ne + He
|
NIDEK
|
ArF
|
193
|
Ar + Ne + He (NIDEK BUFER)
F2 + He (NIDEK FLOURINE)
F2 + Ar + He + Ne (NIDEK PREMIX)
|
SCHWIND AMARIS
|
ArF
|
193
|
F2 + He + Ar + Ne (SCHWIND)
|
STAR S4 IR®
|
ArF
|
193
|
F2 + He + Ar + Ne (VISX PREMIX)
He (VISX HELIUM)
|
WaveLight Allegretto Wave Eye-Q
|
ArF
|
193
|
F2 + He + Ar + Ne
|
, - (OOO "")
|
ArF
|
193
|
F2 + Ar + Ne
|
CL 5100, 5200, 5300 (OOO "")
|
FKr
|
248
|
F2 + He + Kr + Ne
|
-308
|
XeCl
|
308
|
HCl + Xe + Ne
|
, ,
|
ArF
|
193
|
1% F2 + 3,5% Ar + Ne
|
XeCl
|
308
|
10 ppm Xe + 3,5% Ar + Ne
HCl + H2 + Ne
|
KrF
|
248
|
1% F2 + 1,25% Kr + Ne
1,25% Kr + Ne
|
CL7100 (OOO "") | KrF | 248 | F2 + He + Kr + Ne |
Technolas (Bausch & Lomb) | ArF | 193 | F2 + He + Ar + Ne |
CL7000 (OOO "") | ArF | 193 | F2 + He + Ne + Ar + Xe (CL7000 PREMIX) |
Cymer | KrF | 248 | F2 + Ne + Kr (Cymer PREMIX) |
| ArF | 193 | F2 +Ne + Ar + Xe (ARF1, ARF2) |
EX5 eximer laser (GAM LASER Inc.) | ArF | 193 | F2 + Ne + Ar + O2 |
MEL 80 Excimer Laser (Carl Zeiss) | ArF | 193 | F2 + Ne + Ar (Carl Zeiss MEDITEC ARF PREMIX C) |
|
,
|
|
He
|
99,9999%
|
Ne
|
99,9995%
|
Ar
|
99,9999%
|
Kr
|
99,9999%
|
Xe
|
99,99995%
|
: , , , .
|
, ( ) . , .
|
|
, . .
|
|
|
CAS
|
|
|
|
|
1956
|
|
|
|
|
|
|
( 2015)
|
2.2
|
|
|
|
 
|
|
|
(NS), , (QTS), (SS).
, 3
|
⌀D×H,
|
,
|
10
|
⌀14×82
|
14
|
16
|
⌀18×78
|
20
|
20
|
⌀20,5×81
|
25
|
40
|
⌀22×128
|
39
|
50
|
⌀23,5×147
|
57
|
100 150 .
|
.
|
, . DIN 14, DIN 8. .
|
|