|
|
: Silicon tetrafluoride,
.
|
5.0
|
,
|
99,999%
|
:
|
O2 + Ar
|
< 1 ppm
|
N2
|
< 3 ppm
|
CO
|
< 0,5 ppm
|
CO2
|
< 1 ppm
|
CH4
|
< 10 ppm
|
As
|
< 0,5 ppm
|
B
|
< 0,5 ppm
|
P
|
< 0,5 ppm
|
|
|
|
104,07911 /
|
CAS
|
7783-61-1
|
|
|
|
UN1859
|
|
-95,2° C
|
|
|
|
-86,8 C 2,24
|
( 2015)
|
2.3 + 8
|
|
-14,2 C
|
|


|
|
3,715
|
, 3
|
⌀D×H,
|
,
|
,
|
10
|
⌀14×82
|
14
|
4-8
|
40 ()
|
⌀23×128
|
39
|
16-32
|
40 ()
|
⌀22×128
|
65
|
16-32
|
50
|
⌀23,5×147
|
57
|
20-40
|
, DIN 8 (G3/4) DIN 6 ( 21,8 × 14 /), .
|
|