|
|
: Nitrogen trifluoride
, .
|
4.0
|
,
|
99,99 %
|
:
|
CF4
|
< 50 ppm
|
CO
|
< 0,5 ppm
|
CO2
|
< 5 ppm
|
H2O
|
< 1 ppm
|
N2
|
< 7 ppm
|
N2O
|
< 5 ppm
|
O2 + Ar
|
< 15 ppm
|
SF6
|
< 10 ppm
|
HF
|
< 1 ppm
|
C2F6
|
< 1 ppm
|
|
, , .
|
|
71 /
|
CAS
|
7783-54-2
|
|
|
|
UN2451
|
|
- 129 °C
|
|
3
|
|
- 207 C
|
( 2105)
|
2.2 + 5.1
|
|
-39,25 C
|
|
 

|
|
4,531
|
– 40- (~18 ). .
|
|